Muto Technology, Inc., Semiconductor Support Specialist.

Product and Services

PVD Kitting Programs
Disposable Kit Program
Total Kit Solution
Etch and CVD Kitting

OEM & Custom Components
Searchable Database

Refurbishment

Search Products

OEM Part Number	MTI Part Number	Description
1810-224634-11	MY-76080	200mmNW-2(8K-ESC)
1805-320139-11	MY-76014	Base Ring
1805-320142-11	MY-76016	Base Ring
1805-320103-22	MY-76067	BASE RING COOLING F/R
1805-320127-11	MY-76085	BASE RING, INTEGRATED
3D87-003411-12	MY-76060	Cel Body Assy
3D10-302020-11	MY-76059	CEL,FLAT
1D10-310753-11	MY-76052	Ceramic a-8-2 Ring
1D10-309822-12	MY-76048	Ceramic DEPO Shield
1D10-309823-11	MY-76049	Ceramic Ring A8
1810-329157-11	MY-76069	Cooling ring
1D05-200031-11	MY-76033	COVER BAFFLE Q-L3(DRM2)
1805-320102-12	MY-76007	cover ring
1805-320109-21	MY-76010	Cover Ring
1805-320125-21	MY-76013	COVER RING
3D05-300007-13	MY-76055	Cover ring
1805-320109-13	MY-76009	Cover Ring Outer
1805-320126-11	MY-76084	COVER RING OUTER
1805-320126-21	MY-76083	COVER RING OUTER
1805-320140-11	MY-76015	COVER RING, inner
1805-320110-31	MY-76012	COVER RING, INNER (H6)
3D05-300243-11	MY-76056	Cover RING,360 L
1805-320141-11	MY-76077	COVER, RING OUTER TEL SCCM
1A10-102597-12	MY-76026	Cross plate
1D05-200020-11	MY-76032	DEPO SHIELD QU-A-3
1A10-402430-11	MY-76029	EPD Window
1810-223376-11	MY-76008	Focus Ring
1810-225123-11	MY-76023	FOCUS RING
1810-329156-11	MY-76024	Focus ring
1D10-310020-11	MY-76089	Focus Ring
3D10-201448-12	MY-76058	FOCUS RING
1D10-309946-12	MY-76051	Focus Ring (inside step no polish)
1D10-309946-11	MY-76050	Focus Ring (inside step polish)
1D10-302209-14	MY-76045	Focus Ring (Round)
3D10-200330-12	MY-76057	Focus ring 6.5 T
1D10-406675-11	MY-24878	Focus Ring Plug
3D10-201448-13	MY-76078	FOCUS RING, 360-302-T3.4-COC
1810-222191-11	MY-76020	Focus Ring, 8?
1805-320110-21	MY-76011	Inner ring
3D05-300142-13	MY-76065	insulator ESC. Enclosure
3D05-300257-11	MY-76064	insulator ESC. Enclosure
1A10-411640-12	MY-76030	Plate , 2ND Lifter(ORG. PART)
1A10-414310-11	MY-76031	Plate Cover
1D05-300067-13	MY-76038	PLATE UPPER Q
1D10-200922-12B	MY-76042	PSC Door Back
1D10-200922-12F	MY-76043	PSC Door Front
1D10-200922-12M	MY-76044	PSC Door-Modified
1805-320104-11	MY-76068	RI NG HOLDER COOLING
3D05-200162-12	MY-76088	Ring , shield (G1)
1805-320103-11	MY-76063	Ring Base Cooling F/R QZ
3D05-300236-11	MY-76087	Ring Cover , inner 360 taper
1D10-200921-12	MY-76041	Ring Depo. Shield P1
1805-220135-13	MY-76001	Ring ext outer
1805-220135-23	MY-76002	Ring ext outer
1D05-300296-11	MY-76040	RING F-8SO-Q-260-6H
1810-222433-11	MY-76021	Ring inner
1D05-300188-12	MY-76070	RING INSULATOR
1D05-300190-12	MY-76081	RING INSULATOR
1D05-300052-13	MY-76036	Ring Insulator A7
1D05-300354-11	MY-76073	RING INSULATOR A7 LA6-8
1D05-300353-11	MY-76072	RING INSULATOR A7, DRM2
1D05-300053-14	MY-76037	Ring Insulator B2
1D05-300040-13	MY-76035	Ring Insulator C
1D05-300133-11	MY-76039	RING INSULATOR LA6.0
1D05-300148-11	MY-76071	RING INSULATOR, DRM-2
1810-223624-11	MY-76022	Ring Posistion Shelter
1810-121499-12	MY-76017	Ring Shelter
1D10-304010-12	MY-76046	Ring Shield B3
1810-221018-14	MY-76018	Ring Shield T5
1810-222487-11	MY-76074	Ring Shield T7
1810-223596-11	MY-76079	RING SHIELD T7
1805-220177-12	MY-76066	RING, SHIELD T5-280 QUARTZ SCCM
3D05-200094-12	MY-76054	RING,SHIELD, Qtz
BB10-300023-13	MY-76061	Shield Plate Quartz Window
BB10-306339-11	MY-76062	Shield Plate Quartz Window
1805-220150-12	MY-76004	Shield Ring
1805-220177-11	MY-76005	Shield Ring
1805-220177-22	MY-76006	shield ring
1810-224633-11	MY-76003	shield ring
1805-220077-11	MY-76000	Shield Ring (5-220)
1810-221048-13	MY-76019	SHIELD RING T7 (8K-220)
1A10-203096-14	MY-76027	Shielding
1A10-203097-14	MY-76028	Shielding
1810-329523-11	MY-76025	SI FOCUS RING
1D05-200033-11	MY-76034	SUPPORT SHIELD DEPO Q-S5(DRM2)
1D10-313469-12	MY-76075	TEL FOCUS RING
1D10-313470-11	MY-76076	TEL FOCUS RING
3D10-201448-21	MY-76086	TEL FOCUS RING,360-302-C
ES1D10-407219-11	MY-24882	Threaded Pin
1D10-406876-11	MY-24877	Threaded Pin Support
1D10-307164-11	MY-76047	TOP Insulator Ring
1D10-406499-11	MY-76090	Window DEPO SAF 0.5
1D05-400022-14	MY-76082	WINDOW SHIELD
1D10-406571-11	MY-76053	WINDOW SHIELD WITH HOLES