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Product Name:     Part #:        

     


OEM Part Number
MTI Part Number
Description

15-050160-15

MN-75020

1.125mm GAS TUBE

15-050160-30

MN-75021

1.5 tube

15-00701-00

MN-21303

150mm Lower Fork Plate

15-00703-00

MN-21304

150mm Upper Fork Plate

15-051711-25

MN-75022

2.125mm GAS TUBE

15-00700-00

MN-21305

200mm Lower Fork Plate

15-00702-00

MN-21306

200mm Upper Fork Plate

16-260356-00 Rev C

MN-11339

300mm Adapter Shield

16-260355-00 Rev C

MN-11339-P

300mm Adapter Shield with Arc Spray

04-265324-00

MT-37903

300mm Anova Disposable Shield Kit

04-265325-00

MT-37904

300mm Anova Disposable Shield Kit

17-260362-00 Rev C

MN-11338

300mm Barrel Shield

17-260360-00 Rev C

MN-11349-P

300mm Barrel Shield with Arc Spray

17-260359-00 Rev C

MN-11348-P

300mm Pedestal Shield with Arc Spray

17-260361-00 Rev C

MN-11337

300mmPedestal Shield

15-034333-00

MN-75019

4-Inch Process Tube

15-00043-02

MN-75031

Adjust gas plate

15-052619-00

MN-75023

Alox Fork

15-00866-00

MN-75011

Alox Pin

15-032502-00

MN-75014

Alumina Pin

15-00731-00

MN-75009

BUSHING

15-122178-00

MN-75025

CARRIER RING 300 MM

15-269388-00

MN-75026

CARRIER RING 300 MM

04-730718-01

MN-31435

Chamber Shield

15-033947-00

MN-75017

Cover Plate

15-054434-01

MN-75027

Exclusion Ring

15-054434-02

MN-75028

Exclusion Ring

15-032939-00

MN-75016

Exclusion Ring 2.25

15-032777-00

MN-75015

EXCLUSION RING, 200 MM, 2.00 MM

15-054434-03

MN-75029

EXCLUSION RING, 200 MM, 2.50 MM, OH

15-00699-02

MN-75008

FINGER FORK

15-00699-01

MN-75007

Fork,Finger,150mm

15-053271-02

MN-75034

Gas tube

15-169666-00

MN-31558

Gas tube

15-169667-00

MN-75033

Gas tube

15-251847-00

MN-31559

Gas tube

15-028766-00

MN-75012

GUARD RING 200MM

04-730737-01

MN-23496

Heater Shield

15-00475-00

MN-75000

Insulator,Gas Feedthru,Ceramic

04-730722-01

MN-31436

Left Chamber Shield

15-053394-02

MN-75024

Minimum Contact Area Fork

15-01052-00

MN-21324

Paddle

04-730725-01

MN-31437

Right Chamber Shield

00-647505-00

MN-75030

Ring

15-00483-00

MN-75002

RING, HEATER TUBE

15-00484-00

MN-75003

Ring,Heater Centering,Ceramic

15-110411-00

MN-75006

Sapphire Window

15-00567-00

MN-75004

Tube,Tc,1/200mmID,Ceramic

15-00742-00

MN-75010

Tube,Tc,Ceramic

15-00934-01

MN-21323

Wafer Indexer

15-10628-00

MN-21326

Wafer Indexer

15-032014-00

MN-75013

WINDOW