Muto Technology, Inc., Semiconductor Support Specialist.

Product and Services

PVD Kitting Programs
Disposable Kit Program
Total Kit Solution
Etch and CVD Kitting

OEM & Custom Components
Searchable Database

Refurbishment

Search Products

OEM Part Number	MTI Part Number	Description
D128774	MR-12413	100mm Clamp Ring
D131406	MR-12466	100mm Clamp Ring
D131372-100P	MR-23479	100mm Etch Wafer Pan Shield
D115859	MR-22394	100mm Tabbed Wafer Housing
D127847	MR-29333	100mm Wafer Holder Housing
A131429-05	MT-46916	12" Cathode Vesepl Bearing PM Kit
D122851	MR-12463	125mm Clamp Ring
D125182-125P	MR-23480	125mm Etch Wafer Pan Shield
D124715-125A	MR-23344	125mm Funnel Shield
D124715-125S	MR-23444	125mm Funnel Shield
D124715-125AP	MR-23344-P	125mm Funnel Shield with Arc Spray
D124715-125SP	MR-23444-P	125mm Funnel Shield with Arc Spray
D121385	MR-22455	125mm Heater Ring Segment Shield
D121386	MR-22355	125mm Heater Ring Segment Shield
D126707	MR-22466	125mm Heater Ring Segment Shield
A1211885	MT-49986	125mm MXB Wafer Holder Assembly
D115433	MR-29387	125mm Tabbed Wafer Housing
A115434	MT-49987	125mm Wafer Holder Assembly
A112430	MR-50445	125mm Wafer Holder Weldment
D124821-125A	MR-23310	125mm Wafer Pan Shield
D124821-125S	MR-23410	125mm Wafer Pan Shield
D126771-125A	MR-23376	125mm Wafer Pan Shield
D126771-125S	MR-23476	125mm Wafer Pan Shield
D124821-125SP	MR-23410-P	125mm Wafer Pan Shield with Arc Spray
D115512	MR-22325	150mm AL Housing
D122743	MR-14477	150mm Clamp Ring
D122743-Rev 2	MR-12438	150mm Clamp Ring
D125663	MR-12482	150mm Clamp Ring
D125834	MR-12400	150mm Clamp Ring
D128510	MR-12401	150mm Clamp Ring
D128860	MR-14485	150mm Clamp Ring
D129642	MR-50430	150mm Clamp Ring
D130228	MR-12467	150mm Clamp Ring
D131837	MR-50449	150mm Clamp Ring
D126870	MR-22393	150mm Clamp Ring Housing
D124845-150P	MR-23424	150mm Etch Wafer Pan Shield
D129428-150P	MR-23446	150mm Etch Wafer Pan Shield
D124715-150A	MR-23303	150mm Funnel Shield
D124715-150S	MR-23403	150mm Funnel Shield
D124715-150AP	MR-23303-P	150mm Funnel Shield with Arc Spray
D124715-150SP	MR-23403-P	150mm Funnel Shield with Arc Spray
D112646	MR-22458	150mm Heater Ring Segment Shield
D112647	MR-22381	150mm Heater Ring Segment Shield
D121114	MR-22403	150mm Heater Ring Segment Shield
D121115	MR-22303	150mm Heater Ring Segment Shield
D127037	MR-29407	150mm Heater Ring Segment Shield
A121816	MT-33970	150mm MXB Wafer Holder Assembly
D131499	MR-23491	150mm Reclaim Shield
A115513	MT-33971	150mm Wafer Holder Assembly
A122741	MT-38946	150mm Wafer Holder Assembly
A125833	MT-38947	150mm Wafer Holder Assembly
A126869	MT-33968	150mm Wafer Holder Assembly
A115428	MR-14478	150mm Wafer Holder Weldment
D122742	MR-22377	150mm Wafer Housing
D122725-150S	MR-23478	150mm Wafer Pan Shield
D124821-150A	MR-23319	150mm Wafer Pan Shield
D124821-150S	MR-23419	150mm Wafer Pan Shield
D125409-150A	MR-23311	150mm Wafer Pan Shield
D125409-150S	MR-23411	150mm Wafer Pan Shield
D131388-186S	MR-23493	150mm Wafer Pan Shield
D131498-186A	MR-23393	150mm Wafer Pan Shield
D131498-186S	MR-23493	150mm Wafer Pan Shield
D126728-150P	MR-23489	150mm Wafer Pan Shield Etch
D127533-150P	MR-56401	150mm Wafer Pan Shield Hard Etch
D124821-150SP	MR-23419-P	150mm Wafer Pan Shield with Arc Spray
D125409-150SP	MR-23411-P	150mm Wafer Pan Shield with Arc Spray
D128173-150SP	MR-23445-P	150mm Wafer Pan Shield with Arc Spray
D128227-150SP	MR-23450-P	150mm Wafer Pan Shield with Arc Spray
D131498-160SP	MR-23490-P	150mm Wafer Pan Shield with Arc Spray
D128288	MR-12407	200mm Clamp Ring
D129038	MR-12402	200mm Clamp Ring
D121428	MR-22483	200mm Clamp Ring Housing
D116049	MR-22388	200mm Filler Ring
D116050	MR-22488	200mm Filler Ring
D121429	MR-14484	200mm SS Tab Clamp Ring
A128289	MT-38922	200mm Wafer Holder Assembly
D128289	MT-33974	200mm Wafer Holder Assembly with Arc Spray
D124777	MR-29436	200mm Wafer Holder Housing
D128194	MR-29410	200mm Wafer Holder Housing
D115267	MR-23465	200mm Wafer Pan Shield
D116686	MR-23367	200mm Wafer Pan Shield
D120938	MR-23466	200mm Wafer Pan Shield
D122725-200S	MR-23477	200mm Wafer Pan Shield
D124821-200A	MR-23300	200mm Wafer Pan Shield
D124821-200S	MR-23400	200mm Wafer Pan Shield
D125181-200S	MR-23473	200mm Wafer Pan Shield
D125182-200N	MR-23472	200mm Wafer Pan Shield
D127725-200S	MR-23488	200mm Wafer Pan Shield
D125181-200SP	MR-23473-P	200mm Wafer Pan Shield with Arc Spray
D127725-200SP	MR-23488-P	200mm Wafer Pan Shield with Arc Spray
D119222	MR-40482	8-32 x 3/200mm Vented Phillips Pan Head Screw
D127154-A	MR-23360	Adapter Shield
D127154-S	MR-23460	Adapter Shield
D127367-A	MR-23375	Adapter Shield
D127367-S	MR-23475	Adapter Shield
D127154-SP	MR-23460-P	Adapter Shield with Arc Spray
D131857	MR-31428	Baffle Shield
D131858	MR-31429	Baffle Shield
D129640-S	MR-23492	Bell Jar Adapter Shield
D122750	MR-40490	Captive Screw
D123923	MR-28466	Captive Spacer
D117878	MR-25322	Cathode Adapter Shield
D117878-975	MR-25321	Cathode Adapter Shield
D117923	MR-25323	Cathode Adapter Shield
D119118	MR-25417	Cathode Adapter Shield
D119119	MR-25317	Cathode Adapter Shield
D122310-A	MR-25324	Cathode Adapter Shield
D122310-S	MR-25424	Cathode Adapter Shield
D124839	MR-25325	Cathode Adapter Shield
D124839-A	MR-25303	Cathode Adapter Shield
D124839-S	MR-25404	Cathode Adapter Shield
D124840-A	MR-25326	Cathode Adapter Shield
D124840-S	MR-25426	Cathode Adapter Shield
D124841-A	MR-25305	Cathode Adapter Shield
D124841-S	MR-25405	Cathode Adapter Shield
D131859	MR-31438	Cathode Adaptor
53-0035-031	MR-31118	Center Support Bearing
D131427	MR-31825	Center Support Bearing
D126845	MR-28257	Ceramic Front Roller
	MR-28254	Ceramic Latch Ball Bearing
D127396	MR-28258	Ceramic Latch Body
D127397	MR-41209	Ceramic Latch Shim
D127684	MR-28255	Ceramic Latch Sleeve
D114421	MR-24255	Ceramic Locating Pin
D115052	MR-24258	Ceramic Locating Pin
D126850	MR-28256	Ceramic Rear Roller
D125677	MR-24059	Clamp Ring Stud Spring
D119450	MR-25316	Corner Shield
D119451	MR-25416	Corner Shield
D124822-A	MR-25310	Corner Shield
D124822-S	MR-25410	Corner Shield
D124822-SP	MR-25410-P	Corner Shield with Arc Spray
A11720	MR-10446	Coupling Flex Tube
D116374	MR-23420	Cryo Shield
D116375	MR-23320	Cryo Shield
D121506	MR-23325	Cryo Shield
D121510	MR-23425	Cryo Shield
D123611-A	MR-23322	Cryo Shield
D123611-S	MR-23422	Cryo Shield
D121510-P	MR-23425-P	Cryo Shield with Arc Spray
D111128	MR-22414	Dark Space Ring
D112650	MR-22470	Dark Space Ring
D113950	MR-22314	Dark Space Ring
D117777	MR-22315	Dark Space Ring
D117924	MR-22415	Dark Space Ring
D119223	MR-22406	Dark Space Ring
D119224	MR-22306	Dark Space Ring
D123306	MR-22316	Dark Space Ring
D123306-S	MR-22416	Dark Space Ring
D127146-062A	MR-29325	Dark Space Ring
D127146-062S	MR-29425	Dark Space Ring
D128859	MR-22480	Dark Space Ring
D123167	MR-22307	Dark Space Ring with Girdle
D125082	MR-22407	Dark Space Ring with Girdle
D126254	MR-22489	Dark Space Ring with Girdle
D129731	MR-29488	Dark Space Ring with Girdle
D131767	MR-29481	Dark Space Ring with Girdle
D126917	MR-22359	Dark Space Shield
D131506	MR-29454	Dark Space Shield
D131507	MR-29453	Dark Space Shield
D131436	MR-29352	Dark Space Shield with Girdle
D114056	MR-19409	Door Shield
D114313	MR-19305	Door Shield
D115634	MR-19307	Door Shield
D115634-S	MR-19407	Door Shield
D115635	MR-19308	Door Shield
D115635-S	MR-19408	Door Shield
D115638	MR-19406	Door Shield
D119017	MR-19422	Door Shield
D119278	MR-19323	Door Shield
D121505	MR-19314	Door Shield
D122946	MR-19315	Door Shield
D124432-A	MR-19320	Door Shield
D124432-S	MR-19420	Door Shield
D124820-LA	MR-19304	Door Shield
D124820-LS	MR-19404	Door Shield
D124820-SA	MR-19301	Door Shield
D124820-SS	MR-19401	Door Shield
D124832-HP	MR-19313	Door Shield
D124832-LA	MR-19316	Door Shield
D124832-LS	MR-19416	Door Shield
D124832-SA	MR-19303	Door Shield
D124832-SS	MR-19403	Door Shield
D115634-SP	MR-19407-P	Door Shield with Arc Spray
D115635-SP	MR-19408-P	Door Shield with Arc Spray
D124432-SP	MR-19420-P	Door Shield with Arc Spray
D124820-LAP	MR-19304-P	Door Shield with Arc Spray
D124820-LSP	MR-19404-P	Door Shield with Arc Spray
D124820-SAP	MR-19301-P	Door Shield with Arc Spray
D124820-SSP	MR-19401-P	Door Shield with Arc Spray
D124832-LAP	MR-19316-P	Door Shield with Arc Spray
D124832-LSP	MR-19416-P	Door Shield with Arc Spray
D124832-SAP	MR-19303-P	Door Shield with Arc Spray
D124832-SSP	MR-19403-P	Door Shield with Arc Spray
53-0035-032	MR-31119	Drive Shaft Bearing
D131428	MR-31826	Drive Shaft Bearing
D111388	MR-20409	Etch Catcher
D113703	MR-19410	Etch Door Shield
D112776	MR-22318	Filler Ring
	MR-43414	Flanged Bearing
A125440	MR-28433	Flexible Gas Fitting
D121398	MR-28450	Front Roller
A124842	MT-38926	Funnel Shield Hardware Kit
A117477	MR-27407	Gas Distribution Ring
A117478	MR-27406	Gas Distribution Ring
D125939	MR-27412	Gas Distribution Ring
D125243-A	MR-23329	Gas Distribution Ring Shield
D125243-S	MR-23429	Gas Distribution Ring Shield
D125243-SP	MR-23429-P	Gas Distribution Ring Shield with Arc Spray
A117374	MR-28443	Gas Lead-in Weldment
D117831	MR-23454	Gas Ring Shield
D125953-SP	MR-23459	Gas Ring Shield
D117831-P	MR-23454-P	Gas Ring Shield with Arc Spray
D128456	MR-31113	Graphite Center Support Bearing
D115445	MR-24444	Guide Locating Pin Spring
A124823	MT-38937	Hardware Kit
608094P	MR-24484	Hex Nut
D110142	MR-10212	Insulator
D124942	MR-28497	Latch Body
D124943	MR-28496	Latch Body
D123061	MR-28473	Latch Captive Spacer
D110556	MR-24445	Latch Center Pivot Spring
D122747	MR-24404	Latch Screw
D125676	MR-24461	Leaf Spring
D123041	MR-24462	Leaf Spring Bracket
D112578	MR-24454	Locating Pin Retainer
612063P	MR-24457	Location Pin Retaining Ring
	MR-24460	Location Pin Spring
	MR-42028	Lubed O-Ring
D124681-CR	MR-22478	Mounting Ring
D117879	MR-24403	Nut Plate
D117879-A	MR-24303	Nut Plate
D126771-150A	MR-23313	Pie Pan Shield
D124736-A	MR-23331	Plenum Shield
D124736-S	MR-23431	Plenum Shield
D126401-RA	MR-23358	Plenum Shield
D126401-RS	MR-23458	Plenum Shield
D113033	MR-18410	Pod Shield
D113871	MR-18409	Pod Shield
D114736	MR-18301	Pod Shield
D115238	MR-18428	Pod Shield
D115556	MR-18414	Pod Shield
D115764	MR-18302	Pod Shield
D115767	MR-18411	Pod Shield
D115768	MR-18303	Pod Shield
D115768-S	MR-18403	Pod Shield
D115770	MR-18305	Pod Shield
D115770-MS	MR-18417	Pod Shield
D115770-S	MR-18405	Pod Shield
D116931	MR-18306	Pod Shield
D117540	MR-18329	Pod Shield
D117574	MR-18424	Pod Shield
D117579	MR-18425	Pod Shield
D120490	MR-18313	Pod Shield
D120490-S	MR-18413	Pod Shield
D121504	MR-18308	Pod Shield
D124819-LA	MR-18304	Pod Shield
D124819-LS	MR-18404	Pod Shield
D124819-SA	MR-18307	Pod Shield
D124819-SS	MR-18407	Pod Shield
D125302-LA-L	MR-18315	Pod Shield
D125302-LS-L	MR-18415	Pod Shield
D125302-SA-L	MR-18312	Pod Shield
D125302-SA-R	MR-18326	Pod Shield
D125302-SS-L	MR-18412	Pod Shield
D125302-SS-R	MR-18426	Pod Shield
D129678-LA	MR-18327	Pod Shield
D115768-MSP	MR-18416-P	Pod Shield with Arc Spray
D115768-SP	MR-18403-P	Pod Shield with Arc Spray
D115770-MSP	MR-18417-P	Pod Shield with Arc Spray
D115770-SP	MR-18405-P	Pod Shield with Arc Spray
D124819-LSP	MR-18404-P	Pod Shield with Arc Spray
D124819-SSP	MR-18407-P	Pod Shield with Arc Spray
D125302-LAP-L	MR-18315-P	Pod Shield with Arc Spray
D125302-LSP-L	MR-18415-P	Pod Shield with Arc Spray
D125302-SSP-L	MR-18412-P	Pod Shield with Arc Spray
D119691	MR-18500	Preclean Bell Jar
D124955	MR-28451	Rear Roller
D126429	MR-23423	Reclaim Shield
612014P	MR-43412	Retaining Ring
612122P	MR-43411	Retaining Ring
D112492	MR-10008	RF Contact Spring
D117750	MR-22726	RMX 10 Cathode Insulator Ring
A124957	MT-38912	Roller Latch Assembly
A124958	MT-38913	Roller Latch Assembly
D124959	MR-41408	Roller Latch Washer
D117572	MR-24048	Roller Retaining Ring
	MR-43913	Rotary Seal Assembly
D117832	MR-23330	Scallop Gas Distribution Ring Shield
	MR-44449	Screw
	MR-40491	Screw
	MR-44412	Screw
607229P	MR-44405	Screw
607274P	MR-44450	Screw
607305P	MR-44406	Screw
607400P	MR-44413	Screw
607402P	MR-44475	Screw
607409P	MR-44474	Screw
607507P	MR-44467	Screw
636242P	MR-44418	Screw
A110314	MR-40423	Screw
A110315	MR-40424	Screw
A112552	MR-40497	Screw
A113032	MR-40498	Screw
A115760	MR-44417	Screw
A119222	MR-44404	Screw
A126155	MR-40499	Screw
A127225	MR-44411	Screw
D110508	MR-25328	Screw Shield
D114090	MR-25329	Screw Shield
	MR-44448	Shoulder Screw
A115172	MR-44468	Shoulder Screw Seal Ring
D123226	MR-29712	SPA 10" Cathode Insulator
D123294	MR-29766	SPA 12" Cathode Insulator
D119348	MR-22468	Spacer Ring
D123464	MR-22305	Spacer Ring
D123466	MR-22405	Spacer Ring
D129679	MR-22386	Spacer Ring
D112576	MR-24453	Spring Guide Locating Pin
D115068	MR-41403	SS Flat Washer
D125112	MR-40489	Stud Screw
D112425	MR-28460	Tab Bracket
D121043	MR-24464	Tab, MXB, Wafer Holder
	MR-47000	Viton O-Ring
	MR-47001	Viton O-Ring
	MR-47002	Viton O-Ring
	MR-47003	Viton O-Ring
	MR-47004	Viton O-Ring
	MR-47005	Viton O-Ring
	MR-47006	Viton O-Ring
	MR-47007	Viton O-Ring
	MR-47008	Viton O-Ring
	MR-47009	Viton O-Ring
	MR-47010	Viton O-Ring
	MR-47011	Viton O-Ring
	MR-47012	Viton O-Ring
	MR-47013	Viton O-Ring
	MR-47014	Viton O-Ring
	MR-47015	Viton O-Ring
	MR-47016	Viton O-Ring
	MR-47017	Viton O-Ring
	MR-47018	Viton O-Ring
	MR-47019	Viton O-Ring
	MR-47020	Viton O-Ring
	MR-47021	Viton O-Ring
	MR-47022	Viton O-Ring
	MR-47023	Viton O-Ring
	MR-47024	Viton O-Ring
	MR-47025	Viton O-Ring
	MR-47026	Viton O-Ring
	MR-42012	Viton O-Ring
	MR-42007	Viton O-Ring
	MR-47029	Viton O-Ring
	MR-47030	Viton O-Ring
	MR-47031	Viton O-Ring
	MR-47032	Viton O-Ring
	MR-47033	Viton O-Ring
	MR-47034	Viton O-Ring
	MR-47035	Viton O-Ring
	MR-47036	Viton O-Ring
	MR-47037	Viton O-Ring
	MR-47038	Viton O-Ring
	MR-47039	Viton O-Ring
	MR-47040	Viton O-Ring
	MR-47041	Viton O-Ring
	MR-47042	Viton O-Ring
	MR-47043	Viton O-Ring
	MR-47044	Viton O-Ring
	MR-47045	Viton O-Ring
	MR-47046	Viton O-Ring
	MR-47047	Viton O-Ring
	MR-47048	Viton O-Ring
	MR-47049	Viton O-Ring
	MR-47050	Viton O-Ring
	MR-47051	Viton O-Ring
	MR-47052	Viton O-Ring
	MR-47053	Viton O-Ring
	MR-47054	Viton O-Ring
	MR-47055	Viton O-Ring
	MR-47056	Viton O-Ring
	MR-47057	Viton O-Ring
	MR-47058	Viton O-Ring
	MR-47059	Viton O-Ring
	MR-47060	Viton O-Ring
	MR-47061	Viton O-Ring
	MR-47062	Viton O-Ring
	MR-47063	Viton O-Ring
	MR-47064	Viton O-Ring
	MR-47065	Viton O-Ring
	MR-47066	Viton O-Ring
	MR-47067	Viton O-Ring
	MR-47068	Viton O-Ring
	MR-47069	Viton O-Ring
	MR-47070	Viton O-Ring
	MR-47071	Viton O-Ring
	MR-47072	Viton O-Ring
	MR-47073	Viton O-Ring
	MR-47074	Viton O-Ring
	MR-47075	Viton O-Ring
	MR-47076	Viton O-Ring
	MR-47077	Viton O-Ring
	MR-47078	Viton O-Ring
	MR-47079	Viton O-Ring
	MR-47080	Viton O-Ring
	MR-47081	Viton O-Ring
	MR-47082	Viton O-Ring
	MR-47083	Viton O-Ring
	MR-47084	Viton O-Ring
	MR-47085	Viton O-Ring
	MR-47086	Viton O-Ring
	MR-47087	Viton O-Ring
	MR-47088	Viton O-Ring
	MR-47089	Viton O-Ring
	MR-47090	Viton O-Ring
	MR-47091	Viton O-Ring
	MR-47092	Viton O-Ring
	MR-47093	Viton O-Ring
	MR-47094	Viton O-Ring
	MR-47095	Viton O-Ring
	MR-42008	Viton O-Ring
	MR-47096	Viton O-Ring
	MR-47097	Viton O-Ring
	MR-47098	Viton O-Ring
	MR-47099	Viton O-Ring
	MR-48000	Viton O-Ring
	MR-48001	Viton O-Ring
	MR-48002	Viton O-Ring
	MR-48003	Viton O-Ring
	MR-48004	Viton O-Ring
	MR-48005	Viton O-Ring
	MR-48006	Viton O-Ring
	MR-48007	Viton O-Ring
	MR-48008	Viton O-Ring
	MR-48009	Viton O-Ring
	MR-48010	Viton O-Ring
	MR-48011	Viton O-Ring
	MR-48012	Viton O-Ring
	MR-48013	Viton O-Ring
	MR-48014	Viton O-Ring
	MR-48015	Viton O-Ring
	MR-48016	Viton O-Ring
	MR-48017	Viton O-Ring
	MR-48018	Viton O-Ring
	MR-48019	Viton O-Ring
	MR-48020	Viton O-Ring
	MR-48021	Viton O-Ring
	MR-48022	Viton O-Ring
	MR-48023	Viton O-Ring
	MR-48024	Viton O-Ring
	MR-48025	Viton O-Ring
	MR-48026	Viton O-Ring
	MR-48027	Viton O-Ring
	MR-48028	Viton O-Ring
	MR-48029	Viton O-Ring
	MR-48030	Viton O-Ring
	MR-48031	Viton O-Ring
	MR-48032	Viton O-Ring
	MR-48033	Viton O-Ring
	MR-48034	Viton O-Ring
	MR-42011	Viton O-Ring
	MR-42006	Viton O-Ring
A110165	MR-42001	Viton O-Ring
A110348	MR-42013	Viton O-Ring
A110349	MR-42014	Viton O-Ring
A113520	MR-42000	Viton O-Ring
A113521	MR-42004	Viton O-Ring
A119405	MR-42015	Viton O-Ring
A119406	MR-42016	Viton O-Ring
D112577	MR-24247	Wafer Holder Locating Pin
D116543	MR-23315	Wafer Pan Shield
D116543-S	MR-23415	Wafer Pan Shield
D125181-125A	MR-23340	Wafer Pan Shield
D125181-125S	MR-23440	Wafer Pan Shield
D125181-150A	MR-23304	Wafer Pan Shield
D125181-150S	MR-23404	Wafer Pan Shield
D125181-180A	MR-23363	Wafer Pan Shield
D125181-180S	MR-23463	Wafer Pan Shield
D125182-150P	MR-23426	Wafer Pan Shield Etch
D126727-150P	MR-23439	Wafer Pan Shield Etch
D116543-SP	MR-23415-P	Wafer Pan Shield with Arc Spray
D125181-150SP	MR-23404-P	Wafer Pan Shield with Arc Spray
D125182-150-N	MR-23437	Wafer Pan Soft Etch Shield
D112426	MR-24446	Wafer Tab
608061P	MR-41404	Washer
608062P	MR-41419	Washer
608063P	MR-41407	Washer
608066P	MA-41417	Washer
608147P	MR-41405	Washer
608148P	MR-41406	Washer
608149P	MA-41418	Washer
A118362	MR-41431	Wear Shim