Muto Technology, Inc., Semiconductor Support Specialist.

Product and Services

PVD Kitting Programs
Disposable Kit Program
Total Kit Solution
Etch and CVD Kitting

OEM & Custom Components
Searchable Database

Refurbishment

Search Products

OEM Part Number	MTI Part Number	Description
15-00486-00	ML-25380	125mm Bracket
713-028487-001	ML-14819	150mm Confinement Ring
715-030136-004	ML-22382	150mm Edge ESC Ring
716-011651-006	ML-78088	150mm Edge Ring
716-011830-006	ML-78085	150mm Focus Ring
716-330504	ML-10225	150mm Focus Ring
716-140141-001	ML-21287	150mm Hot Edge Ring, Jeida
713-028553-001	ML-50743	200mm Confinement Ring
713-028553-103	ML-50842	200mm Confinement Ring
716-330045-001	ML-78048	200mm Edge Ring
716-330045-002	ML-78047	200mm Edge Ring
716-330045-004	ML-78046	200mm Edge Ring
716-331089-001	ML-78021	200mm Edge Ring
713-330153-003	ML-24802	Adjustment Rod
716-011543-001	ML-78092	Attachment Ring
715-011913-080-C	ML-21308	Baffle Plate
715-11753-001-C	ML-21307	Baffle Plate
716-028725-161	ML-21278	Bottom Clamp
716-011573-001	ML-43224	Ceramic Plunger
715-330825-006	ML-31303	Chamber Liner
716-140069-001	ML-79017	Clamp Attachment Plate,ESC,150mm
716-140069-002	ML-78056	Clamp Attachment Plate,ESC,150mm
713-011585-001	ML-53740	Clamp Bolt Cover
713-011585-004	ML-53755	Clamp Bolt Cover
715-011565-001	ML-53418	Clamp Retaining Bolt
715-011925-001	ML-53447	Clamp Retaining Bolt
716-011922-001	ML-79015	clamp Ring
716-028768-261	ML-78063	Clamp Ring
716-25025-001	ML-14817	Clamp Ring
716-330167-268	ML-79005	Clamp Ring
713-028485-001	ML-53748	Clamp Ring Electrode Bolt
715-330311-003	ML-24801	Clip
716-014843-001	ML-79000	Confinement Ring
716-014843-300	ML-79007	Confinement Ring
716-140236-003	ML-78051	Confinement Ring
716-443230-002	ML-79013	Confinement Ring
716-140469-002	ML-78013	Coupling Ring
716-013402-003	ML-78082	COV, H/E RING, QTZ
716-460472-002	ML-78011	Cover VIA Ceramic ESC(T8)
716-008645-001	ML-78097	Degrease Sp Insp
716-011563-161	ML-21277	Domed Plate
715-014556-013	ML-53450	Drilled VCR Gasket
716-011651-008	ML-78087	Edge Ring
716-011763-008	ML-78086	Edge Ring
716-030135-001	ML-78062	Edge Ring
716-330045-281	ML-78045	Edge Ring
716-331088-001	ML-78022	Edge Ring
716-331142-304	ML-78020	Edge Ring
716-020904-015	ML-78076	EDGE RING FOCUS LWR WPR CLAMP
716-020904-016	ML-78075	EDGE RING FOCUS LWR WPR CLAMP
715-443130-001	ML-29356	Electrode Ring Clamp (?)
716-440054-108	ML-78019	Extend Liner
716-011570-001	ML-78090	Filler Orifice
716-140118-001	ML-78054	Filler Ring
716-330162-002	ML-78037	Filler Ring
716-013453-002	ML-78081	Filler Ring 200mm
716-011830-008	ML-78084	Focus Ring
716-018614-081	ML-78078	Focus Ring
716-330504-081	ML-78029	Focus Ring
716-460915-001	ML-78007	Focus Ring
716-460915-002	ML-78005	Focus Ring
716-018614-082	ML-78077	Focus Ring 200mm,Jeida,ESX,4420
716-140068-001	ML-78057	Focus Ring,ESC,150mm
716-031453-002	ML-78059	FR, lower chamber ESC
716-330892-007	ML-78027	Gas Distribution Plate
716-330915-001	ML-78026	Gas Ring Insert
716-460785-007	ML-78009	GDP
3-833820-03	ML-22337	Ground Electrode Shield
715-2301851-001	ML-21301	Ground Grid
715-250899-001	ML-21302	Ground Grid
0020-16663	MA-44460	Head Post
716-003543-001	ML-78099	Hot Edge Ring
716-140139-001	ML-79016	Hot Edge Ring
716-140139-008	ML-78053	Hot Edge Ring
716-140139-211	ML-78052	Hot Edge ring
716-140163-001	ML-21279	Hot Edge Ring
716-443086-301	ML-78018	Hot Edge Ring
716-443086-305	ML-79004	Hot Edge Ring
716-443086-401	ML-78017	Hot Edge Ring
716-443129-001	ML-78015	Inner Focus Ring
716-443234-001	ML-79002	Inner Focus Ring
716-443234-002	ML-78049	Inner Focus Ring
716-460916-001	ML-78004	Inner Ring
716-460875-002	ML-78008	INSUL, LWR ELTD, STP Chamber
716-021874-001	ML-78072	Leg AGS Dorector, LWR ISO ETCH
716-460758-001	ML-78010	Liner View Port
716-443189-002	ML-78014	Low Cover Ring
715-140080-001	ML-21381	Lower Baffle Plate
715-140126-001	ML-21368	Middle Seal Baffle Plate
715-330000-090M	ML-27301	Modified Gas Ring
716-460957-002	ML-78002	ocus Ring
715-330000-090	ML-27302	Original Gas Ring
716-013344-001	ML-51519	Outer Cover Ring
716-460916-002	ML-78003	Outer Ring
0020-11848	MA-44762	Peek Clamp Post
713-520546-002	ML-27711	Peek Gap Seal Ring
716-011923-001	ML-78083	Plate , W/C 150mm, DMD, 1.5mm CVW/Pin
716-028721-281	ML-78064	Plate BTM Clamp DOM Shadow
716-028678-261	ML-78066	Plate Wafer Clamp
716-028688-261	ML-78065	Plate Wafer Clamp
716-330167-151	ML-78036	Plate Wafer Clamp
716-330167-161	ML-78035	Plate Wafer Clamp
716-330167-181	ML-78034	Plate Wafer Clamp
716-330167-281	ML-78033	Plate Wafer Clamp
713-011578-003	ML-53742	Plunger Guide Sleeve
716-028454-012	ML-78067	Quartz Ring Plate
713-011926-001	ML-53749	Retaining Clamp Cap Bolt
716-330121-001	ML-10231	RF Shaped Window
716-011057-002	ML-78094	Rign Filler Upper Alumina
716-016394-001	ML-78080	Ring Confinment
716-020904-018	ML-78074	Ring Edge Focus 200mmL WFR Clamp
716-011540-001	ML-78093	Ring Face-upper Electrode
716-028123-002	ML-78071	Ring Filler Ceramic
716-028123-004	ML-78069	Ring Filler Ceramic
716-028123-003	ML-78070	Ring Filler Ceramic, Hi-Conduct
716-020905-001	ML-78073	Ring Filler LWR Wafer Clamp
716-011036-001	ML-78095	Ring filler Orifice
716-140110-001	ML-78055	Ring Focus
716-460215-002	ML-78012	Ring Focus STP CHM
716-007136-002	ML-78098	RING, QURTZ, UPPER, HPT
716-100180-003	ML-78058	Ring,Confinement,10304B
716-031453-001	ML-78060	Ring,Fillier,Lower Chamber
716-330504-061	ML-78031	Ring,FOC 150mm,ESC,GD Ring
716-330504-064	ML-78030	Ring,FOC 150mm,ESC,GD Ring
716-028249-364	ML-78068	Ring,FOC,JEIDA,150mm,GR,SHORT,ESC
716-017112-002	ML-79001	RING,WAP,TWIST TOP,17IN,300MM,2300
716-017581-002	ML-79008	Ring. ELCTD. 2 piece
716-031257-309	ML-79010	Ring.EDGE, TOP 300mm
716-026652-002	ML-79009	RING.EDGE.BOT.200-300mm
716-017112-300	ML-79011	Ring.WAP .17.07 x 1.1 THK.AN SLT
0015-00699	MA-44459	Screw
0021-37988	MA-44357	Screw
0021-38946	MA-44458	Screw
715-011565-002	ML-44445	Screw
720-009531-004	ML-53752	Screw
720-009531-010	ML-44734	Screw
720-016278-114	ML-44727	Screw
720-040808-010	ML-44727	Screw
720-040810-010	ML-44783	Screw
720-090685-010	ML-53744	Screw
720-090943-010	ML-53743	Screw
720-092758-010	ML-53853	Screw
720-092759-016	MT-44826	Screw
720-093814-008 / 720-091096-008	ML-53739	Screw
720-093815-006 / 720-009531-006	ML-53738	Screw
720-443144-006	ML-44740	Screw
720-443148-010	ML-44728	Screw
720-443208-010	ML-44741	Screw
720-901137-020	ML-44742	Screw
796-028633-010	ML-53351	Screw
715-2100391	ML-30312	Slot Valve Door
713-011545-002	ML-53741	Spring Guide
716-330121-003	ML-78044	TCP Window
716-330891-002	ML-78028	Top Disk
716-800951-311	ML-78000	Top Focus Ring
716-494968-001	ML-78001	Top Liner/Adapter Ring
716-330122-002	ML-78039	Top Plate
716-330122-003	ML-78038	Top Plate
716-330890-001	ML-79014	U-ring
716-331051-002	ML-78025	Uniformity Ring
716-331051-003	ML-78024	Uniformity Ring
716-331051-006	ML-78023	Uniformity Ring
715-140081-001	ML-21380	Upper Baffle Plate
716-330121-004	ML-78043	Upper Ceramic Shaped Window
716-330121-014	ML-78042	Upper Ceramic Shaped Window
716-330121-211	ML-78040	Upper Ceramic Shaped Window
716-330121-016	ML-78041	Upper Ceramic Shaped wWindow
715-443098-001	ML-29355	Upper Electrode Ring Clamp
716-140432-002	ML-78050	Upper Keyed Ring
716-443090-010	ML-78016	Upper Ring
715-140124-001	ML-21367	Upper Seal Baffle Plate
716-330971-281	ML-78006	Wafer Clamp
716-011563-151	ML-78091	Wafer Clamp Plate
716-011598-381	ML-78089	Wafer Clamp Plate
716-018527-404	ML-78079	Wafer Clamp Plate
0040-42361	MA-44763	Wedge Clamp
716-330355-001	ML-78032	Window
716-031052-001	ML-78061	Window Quartz
716-031052-002	ML-79006	Window Quartz
716-011009-001	ML-78096	Window Quartz (The Left Side)