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Product Name:     Part #:        

     


OEM Part Number
MTI Part Number
Description

0020-22795

MA-17410

100mm/125mm Lower Shield

0240-75083

MT-34950

101 Hardware Kit

0240-11789

MT-55903

101 Rest Button Kit

0200-00034

MA-31573

125 mm Quartz Cover, Poly

0200-00012

MA-31572

125 mm Quartz Ring, Poly

0020-03589

MA-14814

125mm Clamp Ring

0020-21275

MA-14465

125mm Clamp Ring

0020-33739

MA-14855

125mm Clamp Ring

0020-21664

MA-22275

13" Insulator Source

0020-23180

MA-15305

150mm 101 Pedestal

0020-24387

MA-15407

150mm 101 Pedestal

0020-26583

MA-21411

150mm 101 Shutter Disk

0021-20044

MA-21454

150mm 101 Shutter Disk

0021-21814

MA-21661

150mm 101 Shutter Disk

0021-20572

MA-15428

150mm A101 Pedestal

0020-22920

MA-17337

150mm AL Preclean Shield

0020-26589

MA-17338

150mm AL Preclean Shield

0200-20325

MA-15262

150mm B101 IMP Pedestal

0020-29345

MA-11317

150mm B101 IMP Vectra Lower Shield

0020-00989

MA-14875

150mm Clamp Ring

0020-22165

MA-14643

150mm Clamp Ring

0020-22361

MA-50454

150mm Clamp Ring

0020-23669

MA-14444

150mm Clamp Ring

0020-24572

MA-14428

150mm Clamp Ring

0020-25046

MA-12488

150mm Clamp Ring

0020-25059

MA-12408

150mm Clamp Ring

0020-26455

MA-14429

150mm Clamp Ring

0020-26474

MA-12434

150mm Clamp Ring

0020-26578

MA-14435

150mm Clamp Ring

0020-26610

MA-12411

150mm Clamp Ring

0020-26981

MA-14667

150mm Clamp Ring

0020-27100

MA-14445

150mm Clamp Ring

0020-27740

MA-14450

150mm Clamp Ring

0020-29011

MA-14466

150mm Clamp Ring

0020-29202

MA-12479

150mm Clamp Ring

0020-29459

MA-12412

150mm Clamp Ring

0020-30678

MA-14816

150mm Clamp Ring

0020-31656

MA-12839

150mm Clamp Ring

0020-32339

MA-50877

150mm Clamp Ring

0020-32987 (?)

MA-50835

150mm Clamp Ring

0020-34118

MA-14801

150mm Clamp Ring

0021-06873

MA-14437

150mm Clamp Ring

0200-09670

MA-71040

150mm Clamp Ring

0020-26971

MA-25666

150mm Clamped Shutter

0200-09757

MA-71045

150mm ClampRing

0020-28357

MA-17461

150mm CoTi Lower Shield

0020-10067

MA-16464

150mm Cover Ring

0020-23066

MA-16309

150mm Cover Ring

0020-23174

MA-16627

150mm Cover Ring

0020-23181

MA-16301

150mm Cover Ring

0020-24386

MA-16408

150mm Cover Ring

0020-28205

MA-16620

150mm Cover Ring

0021-22264

MA-12633

150mm Degas Clamp Ring

0020-28140

MA-17492

150mm Degas Lower Shield

0021-21900

MA-22653

150mm Deposition Ring

0020-26403

MA-16443

150mm ESC Cover Ring

0021-21885

MA-29615

150mm ESC Deposition Ring

0200-10265

MA-71070

150mm Focus Ring

0020-03379

MA-21331

150mm Gas Distribution Plate

0020-27207

MA-14639

150mm HTHU Clamp Ring

0020-27701

MA-14636

150mm HTHU Clamp Ring

0020-27944

MA-50604

150mm HTHU Clamp Ring

0020-47122

MA-12644

150mm HTHU Clamp Ring

0021-22619

MA-14673

150mm HTHU Clamp Ring

0020-26823

MA-17434

150mm HTHU Lower Shield

0021-29625

MA-11457

150mm HTHU Lower Shield

0021-20726

MA-16432

150mm IMP Cover Ring

0200-20348

MA-16232

150mm IMP Cover Ring

0200-09850

MA-71052

150mm Insert Ring

0020-09035

MA-70003

150mm Lift Pin

0200-09035

MA-71012

150mm Lift Pin

0021-70375

MA-15424

150mm Lower Pedestal Cover

0020-21463

MA-17406

150mm Lower Shield

0020-21464

MA-17391

150mm Lower Shield

0020-22292

MA-17352

150mm Lower Shield

0020-22892

MA-17423

150mm Lower Shield

0020-23069

MA-17304

150mm Lower Shield

0020-24384

MA-17404

150mm Lower Shield

0020-24614

MA-17444

150mm Lower Shield

0020-24959

MA-17441

150mm Lower Shield

0020-25640

MA-17402

150mm Lower Shield

0020-26289

MA-17436

150mm Lower Shield

0020-26310

MA-17440

150mm Lower Shield

0020-26439

MA-17483

150mm Lower Shield

0020-28043

MA-17478

150mm Lower Shield

0020-26906

MA-17497-P

150mm Lower Shield with Arc Spray

0020-27094

MA-17400-P

150mm Lower Shield with Arc Spray

0020-28207

MA-17462-P

150mm Lower Shield with Arc Spray

0020-28929

MA-11459-P

150mm Lower Shield with Arc Spray

0020-02537

MA-17468

150mm Lower SIP Shield

0020-10120

MA-21347

150mm Oxide Perf

0020-27113

MA-12664

150mm Padded Clamp Ring

0020-27946

MA-14638

150mm Padded Clamp Ring

0020-24418

MA-21632

150mm Paste Wafer

0020-28420

MA-15623

150mm Pedestal Cover

0030-00219

MA-10729

150mm Pedestal Ring

0020-28421

MA-15618

150mm Pedestal Shield

0020-30086

MA-21360

150mm Perforated Plate

0240-27888

MT-46908

150mm PIK Endura Preclean Consumable Kit

0020-24095

MA-15622

150mm Preclean Pedestal

0020-27122

MA-15613

150mm Preclean Pedestal

0020-27124

MA-15614

150mm Preclean Pedestal

0020-27868

MA-15634

150mm Preclean Pedestal

0020-27869

MA-15632

150mm Preclean Pedestal

0020-22909

MA-15312

150mm Preclean Pedestal Shield

0020-42083

MA-27303

150mm Pumping Plate

0200-00151

MA-31571

150mm Qtz. Insulator, PC-II

0200-00152

MA-31544

150mm Qtz. Insulator, PC-II

0200-20058

MA-51513

150mm Quartz Insulator

0200-20061

MA-15564

150mm Quartz Insulator

0200-76068

MA-51511

150mm Quartz Shadow Ring

0200-09087

MA-71017

150mm Ring Sputter Etch

0200-09021

MA-71009

150mm Shield Ceramic

0020-28994

MA-25680

150mm Shutter

0020-28390

MA-21418

150mm Shutter Disk

0020-28392

MA-21659

150mm Shutter Disk

0200-35623

MA-51012

150mm Silicon Ring Insert

0020-10066

MA-11458-P

150mm SIP Lower Shield with Arc Spray

0010-00706

MA-14802

150mm Vespel Clamp Ring Assembly

0020-03696

MA-14808

150mm Vespel Clamp Ring Base

0021-21971

MA-16444

200mm 101 Cover Ring

0020-22196

MA-15306

200mm 101 Pedestal

0020-24913

MA-15404

200mm 101 Pedestal

0020-27865

MA-15603

200mm 101 Pedestal

0021-22028

MA-15416

200mm 101 Pedestal

0020-26395

MA-15608-P

200mm 101 Pedestal with Arc Spray

0021-22586

MA-21685

200mm 101 Shutter

0020-28754

MA-15426

200mm A101 Pedestal

0020-28937

MA-15457

200mm A101 Pedestal

0021-11747

MA-15400

200mm A101 Pedestal

0021-20106

MA-15415

200mm A101 Pedestal

0200-09618

MA-71038

200mm Adaptor Ring

0021-20718

MA-15427

200mm B101 Lower Pedestal

0040-01549

MA-15465

200mm B101 Lower Pedestal

0020-26961

MA-70011

200mm Blade

0021-06446

MA-17442

200mm Bucket Shield

0200-00307

MA-70032

200mm Capture Ring

0020-07720

MA-12416

200mm Clamp Ring

0020-07747

MA-14471

200mm Clamp Ring

0020-20112

MA-14459

200mm Clamp Ring

0020-20962

MA-12621

200mm Clamp Ring

0020-22510

MA-12498

200mm Clamp Ring

0020-23400

MA-14456

200mm Clamp Ring

0020-24171

MA-50400

200mm Clamp Ring

0020-25836

MA-14452

200mm Clamp Ring

0020-26018

MA-14423

200mm Clamp Ring

0020-26112

MA-14698

200mm Clamp Ring

0020-26547

MA-14421

200mm Clamp Ring

0020-26693

MA-14426

200mm Clamp Ring

0020-26949

MA-12610

200mm Clamp Ring

0020-27018

MA-12435

200mm Clamp Ring

0020-27191

MA-14453

200mm Clamp Ring

0020-27219

MA-14476

200mm Clamp Ring

0020-27220

MA-14449

200mm Clamp Ring

0020-27702

MA-14661

200mm Clamp Ring

0020-28346

MA-12451

200mm Clamp Ring

0020-28631

MA-14441

200mm Clamp Ring

0020-29015

MA-12455

200mm Clamp Ring

0020-29431

MA-12419

200mm Clamp Ring

0020-29436

MA-14631

200mm Clamp Ring

0020-30427

MA-14809

200mm Clamp Ring

0020-30628

MA-14811

200mm Clamp Ring

0020-30710

MA-14812

200mm Clamp Ring

0020-31658

MA-14815

200mm Clamp Ring

0021-20399

MA-14633

200mm Clamp Ring

0021-21034

MA-14680

200mm Clamp Ring

0021-21320

MA-12617

200mm Clamp Ring

0021-21616

MA-14662

200mm Clamp Ring

0021-21936

MA-14497

200mm Clamp Ring

0021-22496

MA-14632

200mm Clamp Ring

0021-70102

MA-12406

200mm Clamp Ring

0020-28380

MA-11423

200mm Clamped Lower Shield

0021-21580

MA-21438

200mm Clamped Shutter

0020-26973

MA-10630

200mm Clamped Shutter Disc

0200-09747

MA-71044

200mm Clamping Ring

0200-09763

MA-71047

200mm Clamping Ring

0200-18078

MA-71082

200mm Collar

0200-18095

MA-71088

200mm Collar

0200-18109

MA-71089

200mm Collar

0200-09606

MA-71033

200mm Cover

0020-22237

MA-16305

200mm Cover Ring

0020-24719

MA-16440

200mm Cover Ring

0020-24914

MA-16404

200mm Cover Ring

0020-27819

MA-16665

200mm Cover Ring

0021-20112

MA-16442

200mm Cover Ring

0200-00589

MA-16234

200mm Cover Ring

0200-00673

MA-16233

200mm Cover Ring

0200-02124

MA-70088

200mm Cover Ring

0200-20331

MA-16228

200mm Cover Ring

0020-08675

MA-16467-P

200mm Cover Ring with Arc Spray

0020-19708

MA-16629-P

200mm Cover Ring with Arc Spray

0020-26396

MA-16403-P

200mm Cover Ring with Arc Spray

0020-93157

MA-16668-P

200mm Cover Ring with Arc Spray

0020-17552

MA-16425

200mm Cover Ring with Shadow Tabs

0021-20096

MA-12618

200mm DeGas Clamp Ring

0021-20113

MA-29438

200mm Deposition Ring

0021-21621

MA-29601

200mm Deposition Ring

0021-60201

MA-29696

200mm Deposition Ring

0200-00242

MA-22297

200mm Deposition Ring

0200-00674

MA-29240

200mm Deposition Ring

0200-01043

MA-22274

200mm Deposition Ring

0200-01042

MA-54202-P

200mm Deposition Ring with Arc Spray

0200-01955

MA-70086

200mm Deposition Ring with Arc Spray

0200-02812

MA-29237-P

200mm Deposition Ring with Arc Spray

0021-23330

MA-17379-P

200mm Encore Inner Shield with Arc Spray

0021-23331

MA-17380-P

200mm Encore Lower Shield with Arc Spray

0020-24804

MA-16412

200mm ESC Cover Ring

0021-18669

MA-16424

200mm ESC Cover Ring with Shadow Tabs

0021-04878

MA-29608

200mm ESC Deposition Ring

0021-15555

MA-29622

200mm ESC Deposition Ring

0021-20789

MA-29618

200mm ESC Deposition Ring

0021-21875

MA-22648

200mm ESC Deposition Ring

0021-21890

MA-22654

200mm ESC Deposition Ring

0021-70210

MA-22652

200mm ESC Deposition Ring

0021-70220

MA-22621

200mm ESC Deposition Ring

0200-05380

MA-54200-P

200mm ESC Deposition Ring with Arc Spray

0021-20788

MA-17428

200mm ESC Lower Shield

0200-09828

MA-71050

200mm Focus Ring

0020-15016

MA-22499

200mm Ground Shield

0200-01006

MA-70063

200mm HDP Dome

0020-27205

MA-14625

200mm HTHU Clamp Ring

0020-26828

MA-11464

200mm HTHU DeGas Lower Shield

0020-26822

MA-17469

200mm HTHU Lower Shield

0020-29346

MA-17373

200mm IMP Lower Shield

0020-29344

MA-17359

200mm IMP Vectra Lower Shield

0020-22975

MA-70007

200mm Insulator

0200-00224

MA-70027

200mm Insulator

0200-20246

MA-28565

200mm Insulator Pinless

0200-20426

MA-31546

200mm Insulator with Ant

0200-00316

MA-70034

200mm Isolator Pumping Ring

0200-09071

MA-71013

200mm Lift Pin

0200-09614

MA-71036

200mm Lift Pin

0200-10074

MA-71061

200mm Lift Pin

0020-21665

MA-17419

200mm Lower Shield

0020-22499

MA-17416

200mm Lower Shield

0020-23044

MA-17390

200mm Lower Shield

0020-23045

MA-17358

200mm Lower Shield

0020-23074

MA-17490

200mm Lower Shield

0020-23277

MA-17458

200mm Lower Shield

0020-23396

MA-17470

200mm Lower Shield

0020-23582

MA-17456

200mm Lower Shield

0020-24082

MA-17308

200mm Lower Shield

0020-24365

MA-17439

200mm Lower Shield

0020-24746

MA-17450

200mm Lower Shield

0020-24866

MA-17424

200mm Lower Shield

0020-24962

MA-17446

200mm Lower Shield

0020-25077

MA-17408

200mm Lower Shield

0020-25311

MA-17425

200mm Lower Shield

0020-25666

MA-17481

200mm Lower Shield

0020-25920

MA-17449

200mm Lower Shield

0020-26288

MA-17432

200mm Lower Shield

0020-26399

MA-17464

200mm Lower Shield

0020-27272

MA-17413

200mm Lower Shield

0020-28615

MA-17475

200mm Lower Shield

0021-20115

MA-11418

200mm Lower Shield

0021-21608

MA-11400

200mm Lower Shield

0020-25281

MA-17430-P

200mm Lower Shield with Arc Spray

0020-26479

MA-17471-P

200mm Lower Shield with Arc Spray

0020-27849

MA-17466-P

200mm Lower Shield with Arc Spray

0020-27863

MA-17403-P

200mm Lower Shield with Arc Spray

0020-28368

MA-17472-P

200mm Lower Shield with Arc Spray

0020-79091

MA-31720

200mm Mirra Retaining Ring

0200-18086

MA-71085

200mm Nozzle

0020-29526

MA-10404-P

200mm Outer Support Cup with Arc Spray

0020-22813

MA-25625

200mm Paste Disk

0200-09827

MA-71049

200mm Pedestal Ring

0021-22161

MA-15442

200mm Pedestal Shield

0020-30407

MA-21348

200mm Perforated Plate

0240-07889

MT-46909

200mm PIK Endura Preclean Consumable Kit

0200-09075

MA-71014

200mm Plate Pumping

0020-29264

MA-17389

200mm Preclean Lower Shield

0040-07518

MA-17487

200mm Preclean Lower Shield

0020-27123

MA-15617

200mm Preclean Pedestal

0020-22844

MA-15325

200mm Preclean Pedestal Shield

0020-22852

MA-17318

200mm Preclean Shield

0020-26588

MA-17317

200mm Preclean Shield

0020-42082

MA-27304

200mm Pumping Plate

0200-09911

MA-31551

200mm Quartz Cover Ring

0021-04643

MA-22449

200mm Ring Shield

0200-10176

MA-14520

200mm Shadow Ring

0020-25256

MA-25658

200mm Shutter

0020-27455

MA-21674

200mm Shutter

0020-28867

MA-21656

200mm Shutter

0021-20042

MA-21427

200mm Shutter

0021-20437

MA-21669

200mm Shutter

0021-20790

MA-21455

200mm Shutter

0021-22191

MA-21657

200mm Shutter

0020-05384

MA-21433

200mm Shutter Disk

0021-17720

MA-21664

200mm Shutter Disk

0021-17725

MA-21663-P

200mm Shutter Disk with Arc Spray

0021-18436

MA-16622

200mm SIP Cover Ring

0200-01041

MA-16219

200mm SIP Cover Ring

0021-12763

MA-11401

200mm SIP Inner Shield

0020-08673

MA-17448-P

200mm SIP Inner Shield with Arc Spray

0021-17718

MA-11401-P

200mm SIP Inner Shield with Arc Spray

0021-07905

MA-17455

200mm SIP Lower Shield

0020-08674

MA-17447-P

200mm SIP Lower Shield with Arc Spray

0020-21589

MA-17447-P

200mm SIP Lower Shield with Arc Spray

0021-06336

MA-25687

200mm SIP Shutter

0021-21444

MA-17477

200mm SIP Upper Shield

0240-17974

MT-34968

200mm Ta Encore Shield Kit

0020-10117

MA-21346

200mm Teos Perf Plate

0200-20285

MA-15233

200mm Upper Pedestal

0020-08115

MA-14842

200mm Vespel Clamp Ring

0200-00231

MA-70028

200mm Wafer Blade

0021-35713

MA-31308

200mm Wafer Paddle

0020-29719

MA-15438

200mm ZDP Pedestal

0021-11075

MA-15337

200mm ZDP Pedestal

0040-13509

MA-70021

300 mm Bell jar

0200-01326

MA-10239

300mm Adaptor Source Ring

0200-20437

MA-29275

300mm Ceramic Deposition Ring

0200-01863

MA-70084

300mm Coller Ring

0021-16783

MA-16630

300mm Cover Ring

0021-22064

MA-16458

300mm Cover Ring

0021-22177

MA-16445

300mm Cover Ring

0200-00511

MA-70044

300mm Cover Ring

0020-24166

MA-16469-P

300mm Cover Ring with Arc Spray

0020-43170

MA-16431-P

300mm Cover Ring with Arc Spray

0020-44973

MA-16431-P

300mm Cover Ring with Arc Spray

0020-63124

MA-16460-P

300mm Cover Ring with Arc Spray

0021-17770

MA-16457-P

300mm Cover Ring with Arc Spray

0020-61187

MA-29467

300mm Deposition Ring

0040-07291

MA-29479

300mm Deposition Ring

0200-01389

MA-29299

300mm Deposition Ring

0200-04017

MA-10240

300mm Deposition Ring

0020-63125

MA-29485-P

300mm Deposition Ring with Arc Spray

0040-51718

MA-54404-P

300mm Deposition Ring with Arc Spray

0200-02181

MA-29235-P

300mm Deposition Ring with Arc Spray

0200-02863

MA-29235-P

300mm Deposition Ring with Arc Spray

0200-02114

MA-10224

300mm Double RF Housing

0020-48628

MA-29378

300mm Edge Ring

0020-42941

MA-17398-P

300mm Encore Inner Shield with Arc Spray

0020-44975

MA-17398-P

300mm Encore Inner Shield with Arc Spray

0020-23579

MA-17399-P

300mm Encore Lower Shield with Arc Spray

0020-44976

MA-17399-P

300mm Encore Lower Shield with Arc Spray

0020-42543

MA-11320

300mm ESC IMP Lower Shield

0020-01220

MA-31411

300mm IMP Inner Bracket

0020-03041

MA-17376

300mm IMP Lower Shield

0020-24167

MA-43425

300mm Inner Shield Clamp

0200-01903

MA-70000

300mm Insulator

0200-02743

MA-70098

300mm Insulator

0200-03456

MA-71006

300mm Insulator

0200-76058

MA-72075

300mm insulator

0200-01311

MA-70069

300mm Insulator Heater

0040-61580

MA-11312

300mm Lower Preclean Shield

0040-86514

MA-11313

300mm Lower Preclean Shield

0020-08194

MA-11428

300mm Lower Shield

0020-29711

MA-11425

300mm Lower Shield

0021-22065

MA-11444

300mm Lower Shield

0020-24164

MA-11472-P

300mm Lower Shield with Arc Spray

0020-29527

MA-10415-P

300mm Outer Support Cup with Arc Spray

0020-44974

MA-10415-P

300mm Outer Support Cup with Arc Spray

0040-55456

MA-18543

300mm Preclean bell jar

0020-23799

MA-10054

300mm RF Bar

0020-86040

MA-10035

300mm RF Bar

0200-02121

MA-31242

300mm RF Feedthru Insulator

0021-11486

MA-21462

300mm Shutter

0021-19207

MA-21625

300mm Shutter

0021-25014

MA-25498

300mm Shutter

0021-25150

MA-21671

300mm Shutter

0021-26609

MA-10418

300mm Shutter

0040-70836

MA-31615

300mm Shutter Arm

0040-70837

MA-31614

300mm Shutter Arm

0021-15657

MA-21676-P

300mm Shutter Disk with Arc Spray

0020-45231

MA-25699-P

300mm Shutter with Arc Spray

0020-45657

MA-10458-P

300mm Shutter with Arc Spray

0020-08299

MA-29424

300mm SIP Inner Shield Clamp

0020-02345

MA-11446-P

300mm SIP Inner Shield with Arc Spray

0021-16287

MA-17493

300mm SIP Lower Shield

0020-02348

MA-29423

300mm SIP Lower Shield Clamp

0020-02344

MA-11445-P

300mm SIP Lower Shield with Arc Spray

0021-16782

MA-17494

300mm SIP Middle Shield

0020-26374

MA-29424

300mm SIP Middle Shield Clamp

0021-16781

MA-17495

300mm SIP Upper Shield

0020-23549

MA-11447-P

300mm SIP Upper Shield with Arc Spray

0200-02262

MA-10234

300mm Support Insulator Bushing

0040-04586

MA-29384

300mm TxZ Inner Shield

0020-08193

MA-11424

300mm Upper Shield

0021-12555

MA-11430

300mm Upper Shield

0021-21234

MA-11426

300mm Upper Shield

0021-24752

MA-11473

300mm Upper Shield

0020-28033

MA-11471-P

300mm Upper Shield with Arc Spray

0200-01089

MA-73000

300mm Wafer Pin

0240-25480

MT-34905

A101 Hardware Kit

0020-22547

MA-31316

Adapter Plate

0020-22982

MA-28438

Adapter Plate

0020-23042

MA-31341

Adapter Plate

0020-23046

MA-28337

Adapter Plate

0040-21289

MA-28438

Adapter Plate

0020-22950

MA-28339

Adapter Plate with water cooling line

0200-09027

MA-71011

Adapter Pumping Plate

0020-23586

MA-17311

Adapter Shield

0020-24531

MA-17411

Adapter Shield

0020-25731

MA-17412

Adapter Shield

0020-24018

MA-43003

Antenna Dowel

0020-24236

MA-24040

Antenna Spring Clip

0040-21985

MA-28476

Anti-Lift Bracket

0200-39296

MA-72064

Aperture Ceramic Cover

0040-09212

MA-70020

Assy Wafer Lift/Wafer Lift HOOP

0200-01462

MA-70071

Baffle

0040-22419

MA-28477

Bias Post Screw

0200-82890

MA-72076

BLADE 125MM-150MM

0200-40126

MA-72068

BLADE 6&200mm THIN ROBOT W/O POCK

0200-35003

MA-71099

Blade Robot

0200-35004

MA-72000

Blade Robot

0200-01861

MA-70083

Blank off

0040-03495

MA-70019

Block insulator

0020-30058

MA-21316

Blocker Plate

0020-30369

MA-21314

Blocker Plate

0020-34445

MA-21350

Blocker Plate

0020-42285

MA-21351

Blocker Plate

0021-09914

MA-21353

Blocker Plate

0200-09616

MA-71037

Bottom Cover

0020-21901

MA-28444

Bracket

0020-06047

MA-43809

Bushing

0200-02396

MA-70093

C-ring

0200-36415

MA-72040

C-Shaped Ceramic Ring

0200-09612

MA-71035

Cap

0021-07747

MA-44487

Captive Screw

0021-22589

MA-44478

Captive Screw

0200-00247

MA-70029

Capture Ring

0200-35323

MA-51204

Capture Ring

0200-35350

MA-73024

Capture ring

0200-35335

MA-72022

CAPTURE RING, DPS, METAL, 195MM

0200-00282

MA-28249

Cathode Insulator

0200-18082

MA-71084

Central Nozzle

0200-36418

MA-72043

Ceramic Cover

0200-01368

MA-70070

Ceramic Injector

0200-39133

MA-72058

Ceramic Inner Endpoint

0020-20314

MA-29251

Ceramic Insulator

0200-26254

MA-71098

Ceramic Insulator

0200-10144

MA-51209

Ceramic Isolator Ring

0200-36666

MA-72050

Ceramic Isolator, Producer 200mm

0200-02421

MA-70095

Ceramic Lid Ring

0200-00464

MA-70038

Ceramic Lift Ring

0200-00666

MA-70051

Ceramic Liner

0200-00667

MA-70052

Ceramic Liner

0200-00668

MA-51220

Ceramic Liner

0200-39324

MA-51210

Ceramic Liner

0200-01904

MA-73019

Ceramic Pin

0200-35525

MA-72026

CERAMIC RESISTOR

0200-09072

MA-51208

Ceramic Shield

0200-01933

MA-70085

Ceramic Skirt

0200-35427

MA-72023

Ceramic Strips 125mm

0200-35428

MA-72024

Ceramic Strips 3"

0200-00261

MA-73018

Chamber Insert

0200-10143

MA-71063

Chamber Insert Ceramic

0200-36105

MA-72037

Chamber Insert Ceramic

0200-35023

MA-72004

Chamber Liner

0200-35024

MA-72005

Chamber Liner

0200-35065

MA-72007

Chamber Liner

0270-40058

MA-24716

Chamber Scraper

0240-20022

MT-34947

Chamber Shield Sub-Kit

0020-29974

MA-44080

Clamp Feedthru

0020-08465

MA-29441

Clamp Shield

0020-21468

MA-22319

Clamp Shield

0020-22492

MA-16406

Clamp Shield

0020-22493

MA-16407

Clamp Shield

0020-23041

MA-16307

Clamp Shield

0021-17721

MA-29441-P

Clamp Shield with Arc Spray

0021-23334

MA-70017

Coil Support

0021-22583

MA-43423

Coil Support Bushing

0200-09765

MA-71048

Collar Finger

0200-09626

MA-31063

collar SI OX/MLR/NIT 150mm flat

0020-22652

MA-20310

Collimator

0020-22695

MA-20308

Collimator

0020-22734

MA-20304

Collimator

0020-23811

MA-20305

Collimator

0020-24256

MA-20303

Collimator

0020-24558

MA-20301

Collimator

0020-27099

MA-17482

CoTi Upper Shield

0020-27896

MA-17460

CoTi Upper Shield

0200-35865

MA-73021

Cover lock for C-chuck

0200-02042

MA-43222

Cover Pin

0200-02139

MA-43228

Cover Pin

0200-01564

MA-73022

Cover Plate

0200-36630

MA-72046

Cover Plate

0200-36631

MA-72047

Cover Plate

0200-00637

MA-72085

Cover Ring

0200-05263

MA-72093

Cover Ring

0200-09977

MA-71059

Cover Ring

0200-39297

MA-72065

Cover Ring

0020-21759

MA-17326

Cover Shield

0021-20047

MA-70015

Cover Top Ring

0020-09029

MA-31302

Cylinder

0020-20113

MA-28421

DC Bias Assembly Hub

0020-20117

MA-28048

DC Bias Conducting Flex

0021-04354

MA-28095

DC Bias Conducting Flex

0020-28906

MA-28493

DC Bias Hub

0020-20114

MA-28240

DC Bias Isolator

0020-28907

MA-28294

DC Bias Isolator

0020-20119

MA-28400

DC Bias Pad

0020-20126

MA-28242

DC Bias Stand-Off

0240-20021

MT-46910

DC Bias/Clamp Ring Support Kit

0200-01080

MA-73009

Deposition Ring

0200-02677

MA-73010

Deposition Ring

0200-03455

MA-72097

Deposition Ring

0200-05262

MA-72092

Deposition Ring

0200-05517

MA-73013

Deposition Ring

0200-01347

MA-70004

Dome

0200-10324

MA-71072

Dome

0200-18062

MA-71078

Dome

0200-35267

MA-72012

Dome

0200-39137

MA-72060

Dome Ceramic DPS Chamber

0200-35956

MA-72035

Dome, Ceramic, 2.75DIA Window DPS

0200-00175

MA-70026

DPS Dome

0020-30001

MA-25354

Dummy Rack Front Shield

0020-30002

MA-25355

Dummy Rack Rear Shield

0200-10169

MA-21282

Edge Ring Ceramic Lock Down

0200-36118

MA-72038

Edge Ring(New)

0240-27883

MT-34948

ESC Deposition Ring Hardware Kit

0020-18121

MA-70043

ESC Pin

0021-02469

MA-10345

Exhaust Liner Insert

0020-30347

MA-31300

External Cylinder

0020-33881

MA-31301

External Cylinder

0200-50009

MA-72071

External Ring

0020-30722

MA-24811

Finger

0020-29409

MA-28069

Flex Connector Strap

0021-23332

MA-29609-P

Floating Ground Shield with Arc Spray

0200-00136

MA-70023

Focus Ring

0200-00137

MA-70024

Focus Ring

0200-09787

MA-51200

Focus Ring

0200-09787

MA-51200

Focus Ring

0040-20614

MA-20400

Foil Collimator

0040-21325

MA-20411

Foil Collimator

0040-21358

MA-20422

Foil Collimator

0040-22029

MA-20414

Foil Collimator

0040-22030

MA-20412

Foil Collimator

0040-21528

MA-20613-P

Foil Collimator with Arc Spray

0040-23789

MA-20615-P

Foil Collimator with Arc Spray

0020-33805

MA-28472

Gas Cover

0020-30570

MA-21320

Gas Distribution Plate

0020-30816

MA-21337

Gas Distribution Plate

0020-30855

MA-24323

Gas Distribution Plate

0020-31488

MA-21319

Gas Distribution Plate

0020-31490

MA-21322

Gas Distribution Plate

0020-31492

MA-21340

Gas Distribution Plate

0020-31493

MA-21336

Gas Distribution Plate

0020-31547

MA-21341

Gas Distribution Plate

0020-31548

MA-21342

Gas Distribution Plate

0020-31804

MA-21343

Gas Distribution Plate

0020-32259

MA-21344

Gas Distribution Plate

0020-32262

MA-21345

Gas Distribution Plate

0020-33785

MA-21315

Gas Distribution Plate

0020-34139

MA-21329

Gas Distribution Plate

0020-34190

MA-21330

Gas Distribution Plate

0200-35290

MA-72013

Gas Feed Housing

0200-09450

MA-71030

Gas Feed Tube

0200-01091

MA-70065

Gas Injector

0200-01610

MA-70075

Gas Injector

0200-01611

MA-70076

Gas Injector

0200-01612

MA-70077

Gas Injector

0200-02967

MA-71000

Gas Injector

0200-00058

MA-70022

Gas Ring

0020-26967

MA-22335

Gas Trench Cover Ring

0020-22846

MA-22357

Gas Trench Cover Ring, Preclean II

0020-07718

MA-29327

Gas Trench Shield

0200-09242

MA-43121

Graphite DC Bias Plug

0200-09898

MA-24171

Graphite DC Bias Plug

0020-25663

MA-29303

Ground Spacer

0020-08676

MA-24496

Grounded Upper Shield Bushing

0200-02628

MA-70040

Guard Ring

0200-18053

MA-71077

Guide lift pin

0200-00453

MA-70042

Guide Pin

0240-27291

MT-34949

Hardware Kit

0200-01614

MA-70078

Hart Shadow Ring

0020-20123

MA-22276

Heater Isolator

0200-09716

MA-31254

Heater Lift Pin

0020-29214

MA-31667

High-purity Ti Knurled Coil

0020-20381

MA-31669

High-purity Ti Knurled Cup

0020-29310

MA-31668

High-purity Ti Knurled Pin

002-11025-002

ML-79003

Hot Edge Ring

0200-02041

MA-31240

Housing, Double RF Connectors

0200-35295

MA-72016

Housing, Gas Feed, DPS Poly

0040-06127

MA-29394

HP TxZ Inner Shield

0020-29143

MA-28484

IMP Coil Outer Cup Support

0020-29206

MA-28491

IMP Coil Support Bushing

0200-20170

MA-28285

IMP Coil Support Cap

0020-05810

MA-29913

IMP Copper Ring

0020-29343

MA-29414

IMP Dark Space Shield

0020-29306

MA-10407

IMP Feedthru Coil Support Outercup

0020-29348

MA-28492

IMP Feedthru Coil Support Outercup

0200-20169

MA-28286

IMP Insulator Coil Support

0200-20217

MA-28288

IMP Labyrinth Feedthru

0200-20175

MA-28287

IMP Rigid Coil Support

0021-09214

MA-27700

Impeller

0200-00811

MA-70054

Injector

0020-31774

MA-31304

Inner Cylinder

0200-35291

MA-72014

Inner Plug

0200-03555

MA-73015

Inner Ring

0200-10027

MA-71060

Inner Ring

0020-06270

MA-17467

Inner Shield

0200-35018

MA-72002

Insert Exhaust

0200-35160

MA-72010

Insert Inject

0200-01233

MA-70067

Insert Ring

0200-01239

MA-72098

Insert Ring

0200-01509

MA-70073

Insert Ring

0200-01797

MA-70080

Insert Ring

0200-01820

MA-70082

Insert Ring

0200-02302

MA-70090

Insert Ring

0200-02384

MA-70091

Insert Ring

0200-02385

MA-70092

Insert Ring

0200-05032

MA-71007

Insert Ring

0200-10446

MA-51007

Insert Ring

0020-20522

MA-41201

Insulated Lifter Washer

0200-09603

MA-51503

Insulating Pipe

0020-01640

MA-70002

Insulator

0020-24099

MA-72096

Insulator

0020-24438

MA-72095

Insulator

0020-24456

MA-73003

Insulator

0020-25917

MA-70009

Insulator

0020-26254

MA-70010

Insulator

0020-29164

MA-70013

Insulator

0200-00831

MA-70056

Insulator

0200-00863

MA-70059

Insulator

0200-18090

MA-71086

Insulator

0200-20055

MA-71091

Insulator

0200-20060

MA-71092

insulator

0020-21462

MA-70005

Insulator Ceramic

0200-00299

MA-51222

Insulator Coil support

0020-04181

MA-73007

insulator flange

0200-24438

MA-71097

Insulator Quartz

0200-00710

MA-70053

Insulator Ring

0020-23093

MA-70008

Insulator Washer

0200-01427

MA-51221

Isolator

0200-09129

MA-71018

Isolator

0200-10163

MA-71067

Isolator

0200-20114

MA-71093

Isolator

0200-00317

MA-70035

Isolator Pumping Ring

0200-39361

MA-72067

Isolator Silane Pumping Ring

0200-39289

MA-72063

Isolator TEOS Pumping Ring

0200-02747

MA-70099

Lid

0020-23208

MA-24442

Lift Finger

0021-14355

MA-53769

Lift Pin

0200-01798

MA-70081

Lift Pin

0200-03269

MA-31256

Lift Pin

0200-09933

MA-71054

Lift Pin

0200-10284

MA-71071

Lift Pin

0200-18153

MA-71090

Lift Pin

0021-10913

MA-31866

Lift Pin Guide

0200-71240

MA-72074

Lift pin, slim socket head

0200-36649

MA-72049

Lift ring

0270-00489

MA-26998

Lifting Fixture

0270-01417

MA-26999

Lifting Fixture

0200-02397

MA-70094

Linear Ceramic Bottom

0200-02974

MA-71003

Linear Ceramic Bottom

0200-02973

MA-71002

Linear Ceramic Middle

0200-02972

MA-71001

Linear Ceramic Top

0200-05308

MA-73025

Linear View Window Plug

0200-10160

MA-71066

Liner Ceramic

0020-34694

MA-31307

Liner GDP

0200-10157

MA-71064

Liner Junction

0200-36680

MA-72051

Liner, quart, upper Gas DIST, Ground, ASP+

0040-22488

MA-28479

Locking Bias Post Screw

0200-09201

MA-71021

Locwer GDP

0200-18093

MA-71087

Long Side Nozzle

0200-18081

MA-71083

Low Profile Cover

0200-35042

MA-72006

Lower Dome

0020-24898

MA-11419

Lower Shield

0020-26282

MA-11469

Lower Shield

0020-26394

MA-11431

Lower Shield

0240-76690

MT-34904

Lower Shield Hardware Kit

0200-09446

MA-71027

Lower Spacer

0020-33815

MA-28474

Manometer Blank-off

0020-38481

MA-28475

Manometer Bracket

0020-22805

MA-28336

Mounting Plate

0021-09506

MA-25386

Mounting Ring

0020-21870

MA-44456

Nitronic Screw

0021-04229

MA-44454

Nitronic Screw

0021-04230

MA-44453

Nitronic Screw

0021-22584

MA-44455

Nitronic Screw

0200-00635

MA-70039

Nozzle

0200-03010

MA-71004

Nozzle

0200-02763

MA-70041

Nozzle Sleeve

0200-04220

MA-73016

Oter Ring

0020-29525

MA-10403-P

Outer Feedthru Cup with Arc Spray

0200-00622

MA-70047

Outer Ring

0200-10087

MA-71062

Outer Ring

0021-01317

MA-22322

Outer Shield with window

0021-03980

MA-22323

Outer Shield without window

0040-21178

MA-18536

PCII bell jar

0200-00402

MA-43536

Pedestal Bushing

0200-00406

MA-31545

Pedestal Bushing

0200-37023

MA-72057

PEDESTAL CERAMICS RING

0020-22240

MA-24419

Pedestal Rest Button

0020-29335

MA-24497

Pedestal Rest Button

0021-47008

MA-70018

Pedestal Ring

0200-09759

MA-71046

Pedestal Ring

0200-09830

MA-71051

Pedestal Ring

0020-30797

MA-21349

Perf Plate

0020-42287

MA-21352

Perf Plate 200mm

0020-30406

MA-21309

Perforated Plate

0200-00353

MA-70037

Pin

3550-01117

MA-24495

Pin

0200-66218

MA-72072

Pin bshg loose

0200-20216

MA-71094

Pin Cover RF Screw Vectra IMP

0225-09760

MA-72077

PIN LIFT 100 TO 200

0200-40156

MA-72069

PIN LIFT CERAMIC LONG HDP 0200

0200-09147

MA-71020

Pin Wafer Lift

0200-01902

MA-43015

Pin, Antenna Poli SI

0020-05389

MA-24431

Pin, Hoop, Finger

0200-00149

MA-70025

Plasma Tube

0200-09432

MA-71024

Plasma Tube

0020-31918

MA-24181

Plug

3300-02884

MA-24430

Plug

0200-35296

MA-72017

Plug, Inner, Gas Feed Assy

0020-21754

MA-70006

Pocket Plate

0020-22906

MA-43517

Preclean Pedestal Pin

0200-18077

MA-71081

Process Cover

0200-36373

MA-72039

Producer Lift pin OD 0.149 (TSMC12)

0200-09974

MA-71058

Pumping Insert

0200-10164

MA-71068

Pumping Insert

0200-00518

MA-70045

Pumping Ring

0200-36417

MA-72042

Pumping Ring (One Rised Lands)

0200-36416

MA-72041

Pumping Ring (Two Rised Lands)

0200-10526

MA-71076

Pumping ring isolato

0200-00354

MA-51202

Purge Ring

0200-00624

MA-70048

Purge Ring

0200-01531

MA-72091

Purge Ring

0200-01978

MA-73008

Quart Cover Ring

0200-35801

MA-72031

Quart Endpoint window

0200-09741

MA-71043

Quart Focus Ring

0200-39338

MA-72099

Quart insert ring

0200-24099

MA-71096

Quart Insulator

0200-76004

MA-73020

Quart window

0200-00410

MA-31561

Quartz GDP

0200-09074

MA-31553

Quartz Heater Window

0200-00221

MA-31534

Quartz Insulator

0200-10073

MA-31564

Quartz Insulator

0200-20467

MA-71095

Quartz Insulator

0200-35294

MA-72015

Quartz Lower Chamber VPRT DPS

0200-09605

MA-71032

Quartz Plug

0200-10133

MA-31552

Quartz Recessed Endpoint Window

0200-00332

MA-70036

Quartz Single Ring

0200-00218

MA-31533

Quartz Top Cover

0200-09005

MA-31562

Quartz Window

0200-35292

MA-31549

Quartz Window Endpoint

0200-35222

MA-31548

Quartz Window Lamp Housing

0200-35293

MA-31550

Quartz Window Manometer

0200-00525

MA-70046

REACTIVE PRECLEAN PLUS BELL JAR CERAMIC

0015-20281

MA-53401

Rest Button

0020-22511

MA-24480

Rest Button

0020-29640

MA-24483

Rest Button

0200-20315

MA-28290

Rest Button

0020-24423

MA-10333

Retainer Plate

0021-04258

MA-10322

Retainer Plate

3630-01083

MA-43405

Retaining Ring

3630-01091

MA-43402

Retaining Ring

3630-01092

MA-43401

Retaining Ring

0020-21867

MA-10023

RF Bar

0020-29975

MA-44079

RF Connector Bar

0020-29342

MA-44477

RF Connector Nut

0021-22587

MA-44476

RF Connector Nut

0200-20495

MA-31231

RF Feedthru Insulator

0200-20215

MA-31227

RF Housing

0021-09511

MA-28768

RF Mounting Hub

0200-02145

MA-31243

Rigid Coil Support Cap

0200-20494

MA-31230

Rigid Coil Support Cap

0200-20492

MA-31232

Rigid Support Insulator

0020-30658

MA-14806

Ring

0200-35022

MA-72003

Ring PRHEAT W / graphite coated

0200-36685

MA-72052

Ring Single Ceramic

0200-35326

MA-72020

Ring, Focus, 195mm SEMI NOTCH

0200-39140

MA-72061

Ring, Focus, 195mm SEMI NOTCH

0200-35883

MA-72034

Ring, Focus,Ceramic,Modified

0200-35324

MA-72019

Ring, Single 195mm SEMI NOTCH

0200-35322

MA-72018

Ring, Single ESC 197.36 Notch DPS/Combo Ring,DPS POLY IEP

0021-22486

MA-70016

Robot Blade

0200-36638

MA-72048

Robot Blade(Modify W/ Hole)

0200-36393

MA-73001

Sapphire Lift Pin

0200-36693

MA-72054

Sapphire Lift Pin

0200-18073

MA-71079

Sapphire Tube

0015-20035

MA-24327

Screw

0015-20124

MA-44621

Screw

0015-20213

MA-53461

Screw

0020-24332

MA-44488

Screw

0020-30028

MA-70014

Screw

0021-08181

MA-53357

Screw

0200-09723

MA-71042

Screw

0200-10347

MA-71073

Screw

12-312008-08

MA-40435

Screw

3690-00660

MA-53663

Screw

3690-01018

MA-40421

Screw

3690-01029

MA-40473

Screw

3690-01083

MA-40449

Screw

3690-01085

MA-40475

Screw

3690-01094

MA-40455

Screw

3690-01115

MA-40445

Screw

3690-01120

MA-40402

Screw

3690-01124

MA-40458

Screw

3690-01125

MA-40414

Screw

3690-01137

MA-40409

Screw

3690-01150

MA-40476

Screw

3690-01152

MA-40442

Screw

3690-01172

MA-40413

Screw

3690-01175

MA-40420

Screw

3690-01177

MA-40456

Screw

3690-01187

MA-40477

Screw

3690-01190

MA-40407

Screw

3690-01197

MA-40444

Screw

3690-01200

MA-40405

Screw

3690-01213

MA-40461

Screw

3690-01217

MA-40451

Screw

3690-01222

MA-40406

Screw

3690-01240

MA-40417

Screw

3690-01252

MA-40404

Screw

3690-01259

MA-40410

Screw

3690-01266

MA-40419

Screw

3690-01290

MA-40470

Screw

3690-01324

MA-40468

Screw

3690-01350

MA-40465

Screw

3690-01382

MA-40464

Screw

3690-01383

MA-40460

Screw

3690-01422

MA-40457

Screw

3690-01447

MA-40416

Screw

3690-01448

MA-40408

Screw

3690-01452

MA-40400

Screw

3690-01458

MA-40463

Screw

3690-01460

MA-40418

Screw

3690-01502

MA-40415

Screw

3690-01544

MA-40411

Screw

3690-01550

MA-40474

Screw

3690-01589

MA-40454

Screw

3690-01628

MA-40422

Screw

3690-01661

MA-40443

Screw

3690-01694

MA-40462

Screw

3690-01717

MA-40467

Screw

3690-01827

MA-41435

Screw

3690-01869

MA-40488

Screw

3690-01882

MA-40484

Screw

3690-01884

MA-40494

Screw