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Rebuilding
Components such as Eclipse® Wafer Holder Assembly-Clamp Ring, Eclipse® Bearing Latch Assembly and Rebuild Kits for Eclipse® Bearing Latch-Tabbed Wafer Holder can be rebuilt for a cost-effective alternative to new parts. Many fab operators replace used components with new ones, rebuilding used units for inventory as a spare. This rotation reduces inventory expense and downtime. Muto offers both standard OEM and custom rebuilds. Contact Us for a quote concerning your specific needs.
Eclipse® Wafer Holder Assembly-Clamp Ring
NUMBER |
MTI PART # |
QUANTITY |
DESCRIPTION |
1 |
MR-22377 |
1 |
Housing, Clamp Ring, 150MM |
2 |
MR-14477 |
1 |
Clamp Ring, 150MM, Standard |
3 |
MR-38901 |
3 |
Latch, Bearing, Clamp Ring |
4 |
MR-40491 |
6 |
Screw, 10-32 x 5/16" |
5 |
MR-24462 |
3 |
Clamp, Leaf Spring |
6 |
MR-24059 |
3 |
Spring, Seal, Conical |
7 |
MR-40489 |
3 |
Stud, Spring, Seal |
8 |
MR-40490 |
3 |
Stud, Captive Spacer |
9 |
MR-24461 |
3 |
Spring, Leaf, .021" |
10 |
MR-28466 |
3 |
Spacer, Captive |
11 |
MR-24460 |
2 |
Spring, Locating Pin |
12 |
MR-24457 |
2 |
Retainer, Locating Pin |
13 |
MR-24258 |
2 |
Pin, Locating |
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Eclipse® Bearing Latch Assembly
NUMBER |
MTI PART # |
QUANTITY |
DESCRIPTION |
1 |
MR-28464 |
1 |
Roller, Front, Bearing |
2 |
MR-29400 |
1 |
Bearing, Roller, Rear |
3 |
MR-28463 |
1 |
Body, Latch, Bearing |
4 |
MR-29402 |
1 |
Bearing, Center, Pivot |
5 |
MR-24451 |
1 |
Screw, Center, Pivot |
6 |
MR-24048 |
2 |
Retainer, Roller, Latch |
7 |
MR-24056 |
1 |
Spring, Latch, Universal |
8 |
MR-24449 |
1 |
Post, Latch, Clamp Ring |
9 |
MR-29403 |
2 |
Bearing, Roller, Front |
10 |
MR-24452 |
2 |
Retainer, Snap |
Muto's bearing latches have many benefits over standard ceramic and stainless steel latches. Our bearing latches improve process performance by reducing friction and particle generation during latching and unlatching cycles. We achieve this by utilizing high quality miniature precision bearings along every axis of latch rotation. Ultimately, our bearing latches will provide your facility with ongoing, reliable service and quality in addition to superior process performance.
Muto's bearing latches arrive complete and ready to be assembled on your wafer holders. Currently, we offer bearing latches for both tabbed and clamp ring style wafer holders. Bearing latch rebuild kits are also available for your latch refurbishment needs.
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Rebuild Kits for Eclipse® Bearing Latch-Tabbed Wafer Holder
REBUILD KIT FOR FRONT ROLLER-PART #MT-38902 |
MTI Part # |
Qty |
Description |
MR-28464 |
1 |
Roller, Front, Bearing |
MR-29403 |
2 |
Bearing, Roller, Front |
MR-24452 |
2 |
Retainer, Snap |
MR-24048 |
2 |
Retainer, Roller, Latch |
REBUILD KIT FOR CENTER PIVOT-PART #MT-38909 |
MTI Part # |
Qty |
Description |
MR-24451 |
1 |
Screw, Center Pivot |
MR-24056 |
1 |
Spring, Latch, Universal |
MR-29402 |
1 |
Bearing, Center, Pivot |
MR-41416 |
2 |
Shim, Latch, Pivot |
REBUILD KIT FOR REAR ROLLER-PART #MT-38911 |
MTI Part # |
Qty |
Description |
MR-29400 |
1 |
Bearing, Roller, Rear |
MR-24048 |
2 |
Retainer, Roller, Latch |
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Muto’s bearing latch rebuild kits offer many benefits over standard bearing latch rebuild kits. With each of our rebuild kits being pre-built, there is no more fussing around with individual components. In other words, we build each sub-assembly for you to provide quick and easy installation onto the latch body. Best of all, Muto’s bearing latches can be rebuilt at approximately half the price of a new latch. Rebuild kits are available for both tabbed and clamp ring style wafer holders.
Our bearing latches improve process performance by reducing friction and particle generation during latching and unlatching cycles. We achieve this by utilizing high quality miniature precision bearings along every axis of latch rotation. Ultimately, our bearing latches will provide your facility with ongoing, reliable service and quality in addition to superior process performance.
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