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OEM Replacement Parts

Muto Technology offers a complete range of consumables, disposables and replacement parts for PVD, Etch, CVD and related semiconductor equipment by major manufacturers.

Click your equipment manufacturer for more information.

Applied Materials
LAM Research
Novellus
MRC (Metron)
Tokyo Electron

Customized Components
Muto Technology offers a full range of engineering services for component design improvements that boost equipment performance and reliability for more cost-efficient operation. We also offer custom engineering services, providing innovative solutions to your unique production challenges. Whether you need design improvements or completely custom solutions, our experienced staff can quickly convert a tested, proven prototype into the components you need.